(!)Due to Microsoft's end of support for Internet Explorer 11 on 15/06/2022, this site does not support the recommended environment.
- Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 19/4/2026 to 7:00 (MYT) 20/4/2026. We apologize for the inconvenience.
- [Notice] Japan & China Golden Week holidays will start from 29 April to 6 May 2026. Kindly expect longer response from suppliers and possible delivery delay due to high volume of shipments after holiday. Early order placement is recommended. More details
- [Announcement] MISUMI Malaysia website new user interface. Clearer navigation, easy product search and more. Explore now! May contact us at (60) 3 7890 6399 for any inquiries.
Vacuum Pad Standard Small Type VPME
Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.
Japanese Only
Part Number
Configured Part Number is shown.
A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities
Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)
- *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).
Fixed Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | ||||
| Type | Standard | Small | Standard | Small | Standard | Small |
| Symbol | VPA | VPMA | VPB | VPMB | VPE | VPME |
Spring Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | |||
| Type | Standard | Small | Standard | Small | Standard |
| Symbol | VPC | VPMC | VPD | VPMD | VPF |
Coupling size
| Single-action Coupling (mm) | Ø1.8, Ø3, Ø4, Ø6 |
|---|---|
| Barbed Coupling (Applicable Tube Outer Diameter × Inner Diameter) (mm) | Ø1.8 × Ø1, Ø3 × Ø2, Ø4 × Ø2.5, Ø6 × Ø4 |
Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4
Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.
Small pads can be used with semiconductor parts
Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.
The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.
- *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.
| Part Number |
|---|
| VPME4RMN-M3 |
| VPME8RU-M5 |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Rubber Group Material | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Screw |
|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 31.33 | 1 Piece(s) | 13 Day(s) or more | [Nitrile Rubber] Nitrile Rubber | Black | 4 | 4 | 9 | M3 × 0.5 | M3 × 0.5 | ||
MYR 56.62 | 1 Piece(s) | 7 Day(s) or more | Urethane Rubber | Blue | 8 | 5.5 | 11.5 | M5 × 0.8 | M5 × 0.8 |
Loading...
Basic Information
| Pad Type | Standard / Holder Set | Pad Shape | Small | Mounting Method | Recessed Type |
|---|---|---|---|---|---|
| Material | Rubber-based | Environment | Standard | Mounting Fitting | Fixed Type |
| Vacuum Outlet Direction | Top | Fall Prevention Valve | None | Metal parts material | Standard Specifications |
Specification/Dimensions
-
Rubber Group Material
- Nitrile Rubber
- Urethane Rubber
- Nitrile Rubber
-
Color
- Black
- Blue
-
Outer Diameter d(φ)
-
Height L1(mm)
-
Full length B(mm)
-
Mount Connection Screw
- M3 × 0.5
- M5 × 0.8
-
Vacuum Outlet Screw
- M3 × 0.5
- M5 × 0.8
-
type
- VPME
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 7 Day(s) or Less
- 13 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Suction Cups/Standard/Deep/Small
- Vacuum Fittings/Oval/Thin Object/Spring Type/L-Shape
- Vacuum Pad - Standard Type - VPB One-Touch Fitting Type
- Vacuum Pad-Slip Resistant Type Pad Rubber
- Vacuum Pad ZP3 Series
- Short-Type Pad (MU Flat Type) ZP2 Series
- Resin Attachment ZP2 Series
- Non-Contact Gripper XT661 Series (Cyclone Type / Low Profile Cyclone Type / Bernoulli Type)
Customers Who Viewed This Item Also Viewed
-
-
-
Vacuum Pad - Standard Type - Pad RubberPISCO
Standard Price : MYR 17.10-
Days to Ship : 1 Day(s) or more
-
Vacuum Fittings/Small/Direct Mount/J-ShapeMISUMI_Test
Standard Price : MYR 57.75
Days to Ship : 1 Day(s)
-
-
-
-
-
-
Suction Cups/Soft/Soft BellowsMISUMI_Test
Standard Price : MYR 12.10-
Days to Ship : 1 Day(s) or more
-
-
Tech Support
- Factory Automation, Electronics, Tools, & MRO (Maintenance, Repair and Operations)
- Tel：(60) 3 7960 8499 / FAX：(60) 3 7960 7499
- 9:00am - 6:00pm (Monday - Friday)
9:00am - 1:00pm (Saturday) - Technical Inquiry
- Credit Card
- Bank Transfer
Social Media
MISUMI Contact
Copyright © MISUMI Corporation All Rights Reserved.
How can we improve?
How can we improve?
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Customer Privacy Policy
Thank you for your cooperation.
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Please use the inquiry form.
Customer Privacy Policy