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The main unit of the vacuum pin set uses fluororesin (4F-PTFE/3F-PCTFE), and close excellent air-tightness and durability.
*To use tweezers, one of the vacuum pumps "FV-10," "FV-30," "FV-60" and "FV-XP" (sold separately) is required.
Part Number
Configured Part Number is shown.
F002-D-X-101-03-PK
| Type | Vacuum Tweezers | Application | Wafer Transport | Part Structure | Main Body+Components |
|---|---|---|---|---|---|
| Features | Chemical Resistance / Heat resistant | Adsorption Part Material | PEEK | Body Material | Teflon |
| Valve Open-Close System | Normally Open | Axis Connection Method | Freely Type | Axis Details | Plug X Axis |
| Cap Details | X, Z Type Caps | Collet Chuck | No | Absorption Part Details | X and Z-Type Chip |
| Absorption Chip Size(Inch) | 6 | Absorption Chip Size W(mm) | 26 | Absorption Chip Size L2(mm) | 40 |
| Main Body + Component Parts Details | Vacuum Pump Sold Separately |
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