(!)Due to Microsoft's end of support for Internet Explorer 11 on 15/06/2022, this site does not support the recommended environment.
Clean gas filter with highly reliable PTFE membrane.
[Features]
· Replaceable elements.
· Precision filtration of compressed air and nitrogen for semiconductor processes.
· Filtration: 0.01 μm (filtration efficiency 99.99%).
· Disposable type / multiple disc type.
· Connection method: Rc/TSJ/URJ.
· Nominal piping thread: 1/4, 3/8.
· RoHS compliant.
Part Number
Configured Part Number is shown.
| Type | Standard | Compressed Air Quality | General Dry Air | Filtration Level | 0.01μm |
|---|---|---|---|---|---|
| Treatment Air Flow Rate(l/min) | 240 | Operating Environment | Clean Room Specifications (Prevent dust) | Drain Cock | No |
| Bowl Material | SUS316 | Bowl Guard | No | Operating Pressure Range(MPa) | null::0.99 |
How can we improve?
How can we improve?
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Customer Privacy Policy
Thank you for your cooperation.
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Please use the inquiry form.
Customer Privacy Policy