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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series (Part Numbers)
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 4,768.82 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 4,447.66 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 4,393.32 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 1 pc. valve closed | 3 | None | ||
MYR 4,788.70 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 5,096.80 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 4,612.84 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 4,386.21 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 4,535.47 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 4,843.42 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 4,768.82 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange surface, left | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 4,788.70 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange surface, left | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 4,577.75 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange surface, left | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 5,106.97 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14L/S | Flange surface, left | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 4,463.59 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 4,447.66 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | 14L/S | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 4,254.42 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 4,621.66 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | 14L/S | Flange surface, back | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 4,700.96 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | With heater for 120℃ | ||
MYR 4,413.20 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange surface, right | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 4,305.44 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | 14L/S | Flange surface, right | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 4,564.40 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | 14L/S | Flange surface, right | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 4,621.66 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | 14L/S | Flange surface, right | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 6,050.75 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 5,497.48 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,249.40 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,075.48 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 6,378.73 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,214.52 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 5,717.08 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 5,752.17 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 5 | None | ||
MYR 6,388.45 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,219.38 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve open | 0.5 | None | ||
MYR 6,219.38 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 6,428.18 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 5,760.98 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 5 | None | ||
MYR 5,690.72 | 1 Piece(s) | 7 Day(s) or more | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 5,725.81 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 6,139.92 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 6,438.33 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | With heater for 100°C | ||
MYR 6,587.10 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | With heater for 120℃ | ||
MYR 6,050.75 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange surface, left | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 5,497.48 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange surface, left | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 5,717.08 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | 45L/S | Flange surface, left | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 5,754.58 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | 45L/S | Flange surface, left | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 5,392.13 | 1 Piece(s) | 7 Day(s) or more | KF | 40 | 45L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 5,596.51 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 5,498.88 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | 45L/S | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 1 pc. valve open | 3 | None | ||
MYR 6,075.48 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 5,565.74 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 6,219.38 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 5,763.39 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | With heater for 100°C | ||
MYR 5,871.01 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | 45L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | With heater for 120℃ | ||
MYR 5,565.74 | 1 Piece(s) | 32 Day(s) or more | - | - | - | - | - | - | - | - | - | ||
MYR 5,728.99 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | 45L/S | Flange surface, right | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 6,915.08 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 6,280.70 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,315.79 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 7,153.45 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 6,944.67 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 6,465.12 | 1 Piece(s) | 7 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,329.89 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve open | 0.5 | None | ||
MYR 7,078.87 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 6,509.03 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 6,369.39 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | 5 | None | ||
MYR 6,473.86 | 1 Piece(s) | 32 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,325.55 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 1 pc. valve closed | 0.5 | None | ||
MYR 6,263.07 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 6,360.65 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange surface, left | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,483.55 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange surface, left | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,915.08 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 6,395.74 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 6,944.67 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 7,243.08 | 1 Piece(s) | 21 Day(s) | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,473.86 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 6,351.84 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve open | 3 | None | ||
MYR 6,501.18 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | 1 | None | ||
MYR 6,362.55 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | 5 | None | ||
MYR 6,272.77 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 6,184.96 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange surface, right | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 6,272.80 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | 80L/S | Flange surface, right | 5 to 150 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 9,046.55 | 1 Piece(s) | 17 Day(s) or more | KF | 63 | 160L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 9,081.64 | 1 Piece(s) | 17 Day(s) or more | KF | 63 | 160L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 9,945.55 | 1 Piece(s) | 21 Day(s) | KF | 63 | 160L/S | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | - | None | ||
MYR 10,233.37 | 1 Piece(s) | 21 Day(s) | KF | 63 | 160L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | 0.5 | None | ||
MYR 9,905.80 | 1 Piece(s) | 21 Day(s) | K | 63 | 160L/S | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 9,080.50 | 1 Piece(s) | 22 Day(s) or more | K | 63 | 160L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | 3 | None | ||
MYR 9,135.95 | 1 Piece(s) | 32 Day(s) or more | - | - | - | - | - | - | - | - | - | ||
MYR 9,905.80 | 1 Piece(s) | 21 Day(s) | K | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 8,828.55 | 1 Piece(s) | 17 Day(s) or more | K | 63 | 160L/S | Flange surface, right | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None | ||
MYR 8,828.55 | 1 Piece(s) | 17 Day(s) or more | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | - | None |
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Basic Information
| Type | Air-Actuated Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal | Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 |
| Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None |
Specification/Dimensions
-
Flange Type
- KF
- K
-
Flange Nominal
- 25
- 40
- 50
- 63
- 80
-
Sonic Speed Conductance
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- No switch
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLD
- XLD-40
- XLD-63
- XLD-80
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 7 Day(s) or Less
- 17 Day(s) or Less
- 21 Day(s) or Less
- 22 Day(s) or Less
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Vacuum Assist Valve ZP2V Series
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- Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
- Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
- Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
- Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
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