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Vacuum Valves
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
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Vacuum Assist Valve ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.Standard Price: MYR 99.60- Days to Ship: 7 Day(s) or more -
Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
· Flame-retardant (UL94V-0 compliant).
· Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
· Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
· Improved sealing performance, securely sealing with its powerful spring.
· Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
*For DC specification / class B.Standard Price: MYR 1,235.21- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.Standard Price: MYR 2,143.03- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 4,897.81- Days to Ship: 17 Day(s) or more -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.Standard Price: MYR 2,536.38- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,255.69- Days to Ship: 17 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,138.62- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 2,240.01- Days to Ship: 17 Day(s) or more -
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Standard Price: MYR 2,655.90- Days to Ship: 16 Day(s) or more -
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Standard Price: MYR 4,276.81- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.Standard Price: MYR 2,534.41- Days to Ship: 17 Day(s) or more -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,492.21- Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Standard Price: MYR 2,182.84- Days to Ship: 7 Day(s) or more -
SMC
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 4,254.42- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Standard Price: MYR 2,129.25- Days to Ship: 7 Day(s) or more -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Standard Price: MYR 2,721.67- Days to Ship: 17 Day(s) or more -
Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
SMC
A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.Standard Price: MYR 5,048.25- Days to Ship: 21 Day(s)
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| Plumbing Thread Nominal |
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| Flange Nominal |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | |||||||
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| Days to Ship | 7 Day(s) or more | 7 Day(s) or more | 7 Day(s) or more | 17 Day(s) or more | 7 Day(s) or more | 17 Day(s) or more | 7 Day(s) or more | 17 Day(s) or more | 16 Day(s) or more | 7 Day(s) or more | 17 Day(s) or more | 21 Day(s) or more | 7 Day(s) or more | 7 Day(s) or more | 7 Day(s) or more | 17 Day(s) or more | 21 Day(s) |
| Type | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Solenoid Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | High Vacuum Solenoid | High Vacuum Solenoid | Pilot Vacuum Valve | Air-Actuated Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | - | Single | Single | Single | - | - | - | Single | - | - | Single | Single | - | - | - | - | - |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | Directly Operated | - | Directly Operated | - | - | - | Directly Operated | - | - | Air Pilot | Directly Operated | - | - | - | - | - |
| Effective Sectional Area(mm2) | 0.07 ～ 0.78 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | 4.6 |
| Pipe Port Type | M / Rc / NPT / One-Touch Plumbing | Rc / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Swaged Sleeve Fittings |
| Plumbing Thread Nominal | M5 / 1/8 / M6 / M8 | 1/8 / 1/4 / 3/8 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | 1/4 |
| Connecting Tube Diameter | φ4 / φ6 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Flange Type | - | - | NW / Others | KF / K | NW / Others | KF / K | KF / K | KF | KF / K / CF | KF / K / CF | NW | KF | KF | KF / K | KF | KF / CF | - |
| Flange Nominal | - | - | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 | 16 / 25 / 40 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 | - |
| CV Value | 0.0037940379 ～ 0.0422764228 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | 84.87 |
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