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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 2,357.25 | 1 Piece(s) | 21 Day(s) | 16 | 5L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
MYR 2,388.35 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | None | ||
MYR 2,397.08 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
MYR 2,129.25 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
MYR 2,757.20 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
MYR 2,366.39 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | External seal | None | ||
MYR 2,797.44 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
MYR 2,455.28 | 1 Piece(s) | 21 Day(s) | 25 | 14L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
MYR 3,508.79 | 1 Piece(s) | 17 Day(s) or more | 25 | 14L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
MYR 3,074.73 | 1 Piece(s) | 17 Day(s) or more | 25 | 14L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal | None | ||
MYR 2,222.78 | 1 Piece(s) | 7 Day(s) or more | 25 | 14L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
MYR 2,881.49 | 1 Piece(s) | 17 Day(s) or more | 25 | 14L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
MYR 2,222.78 | 1 Piece(s) | 17 Day(s) or more | 25 | 14L/S | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
MYR 3,623.61 | 1 Piece(s) | 22 Day(s) or more | 25 | 14L/S | ULTIC ARMOR UA4640 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | With heater for 120℃ | ||
MYR 3,633.90 | 1 Piece(s) | 21 Day(s) | 40 | 45L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
MYR 4,501.27 | 1 Piece(s) | 17 Day(s) or more | 40 | 45L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
MYR 3,930.36 | 1 Piece(s) | 17 Day(s) or more | 40 | 45L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
MYR 4,419.65 | 1 Piece(s) | 21 Day(s) | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
MYR 4,321.17 | 1 Piece(s) | 17 Day(s) or more | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | None |
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Basic Information
| Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows Seal |
Specification/Dimensions
-
Flange Nominal
- 16
- 25
- 40
- 50
-
Sonic Speed Conductance
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Heater Yes/No
- With heater for 120℃
- None
-
type
- XLH
- XLH-16
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 7 Day(s) or Less
- 17 Day(s) or Less
- 21 Day(s) or Less
- 22 Day(s) or Less
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Vacuum Assist Valve ZP2V Series
- Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
- Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve
- Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
- Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
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