(!)Due to Microsoft's end of support for Internet Explorer 11 on 15/06/2022, this site does not support the recommended environment.
- Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 19/4/2026 to 7:00 (MYT) 20/4/2026. We apologize for the inconvenience.
- [Notice] Japan & China Golden Week holidays will start from 29 April to 6 May 2026. Kindly expect longer response from suppliers and possible delivery delay due to high volume of shipments after holiday. Early order placement is recommended. More details
- [Announcement] MISUMI Malaysia website new user interface. Clearer navigation, easy product search and more. Explore now! May contact us at (60) 3 7890 6399 for any inquiries.
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series (XLH-16)
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XLH-16
| Part Number |
|---|
| XLH-16 |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 2,357.25 | 1 Piece(s) | 21 Day(s) | 16 | 5L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None |
Loading...
Basic Information
| Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows Seal |
Specification/Dimensions
-
type
- XLH
- XLH-16
-
Flange Nominal
- 16
- 25
- 40
- 50
-
Sonic Speed Conductance
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Heater Yes/No
- With heater for 120℃
- None
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 7 Day(s) or Less
- 17 Day(s) or Less
- 21 Day(s) or Less
- 22 Day(s) or Less
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series
- Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
- Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve
- Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series
- Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
Tech Support
- Credit Card
- Bank Transfer
Social Media
MISUMI Contact
Copyright © MISUMI Corporation All Rights Reserved.
How can we improve?
How can we improve?
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Customer Privacy Policy
Thank you for your cooperation.
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Please use the inquiry form.
Customer Privacy Policy