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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

SMC

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

 
30
45
60
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Part Number
XLD-25
XLD-25-A93LA
XLD-25-A93LC
XLD-25-M9//
XLD-25-M9BA
XLD-25-M9BLA
XLD-25-M9NC
XLD-25-M9PA
XLD-25H0
XLD-25K
XLD-25K-M9//
XLD-25K-M9BA
XLD-25K-M9NA
XLD-25L-A93A
XLD-25L-A93LA
XLD-25L-M9//
XLD-25L-M9PLA
XLD-25LH5
XLD-25M-A93A
XLD-25M-M9//
XLD-25M-M9BLA
XLD-25M-M9NLA
XLD-40
XLD-40-A90A
XLD-40-A93A
XLD-40-M9//
XLD-40-M9BA
XLD-40-M9BC
XLD-40-M9BLA
XLD-40-M9BZA
XLD-40-M9NA
XLD-40-M9NB
XLD-40-M9NC
XLD-40-M9NLA
XLD-40-M9NZA
XLD-40-M9PA
XLD-40-M9PLA
XLD-40H0
XLD-40H4
XLD-40H5
XLD-40K
XLD-40K-A90A
XLD-40K-M9BLA
XLD-40K-M9NLA
XLD-40L
XLD-40L-A93A
XLD-40L-A93LB
XLD-40L-M9//
XLD-40L-M9BC
XLD-40L-M9NC
XLD-40LH4
XLD-40LH5
XLD-40M-M9BC
XLD-40M-M9NLA
XLD-50
XLD-50-A90A
XLD-50-A90LA
XLD-50-A93LA
XLD-50-M9//
XLD-50-M9BA
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Length of Lead Wire for Switch
(m) 		Heater Yes/No

MYR 4,768.82

1 Piece(s) 21 Day(s) KF2514L/SFlange side5 to 60No auto-switch (no built-in magnet)No switch-None

MYR 4,447.66

1 Piece(s) 17 Day(s) or more KF2514L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closed3None

MYR 4,393.32

1 Piece(s) 17 Day(s) or more KF2514L/SFlange side5 to 60D-A93 reed auto switch1 pc. valve closed3None

MYR 4,788.70

1 Piece(s) 21 Day(s) KF2514L/SFlange side5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 5,096.80

1 Piece(s) 21 Day(s) KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed0.5None

MYR 4,612.84

1 Piece(s) 17 Day(s) or more KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed3None

MYR 4,386.21

1 Piece(s) 17 Day(s) or more KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closed0.5None

MYR 4,535.47

1 Piece(s) 17 Day(s) or more KF2514L/SFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closed0.5None

MYR 4,843.42

1 Piece(s) 21 Day(s) KF2514L/SFlange side5 to 150No auto-switch (no built-in magnet)No switch-None

MYR 4,768.82

1 Piece(s) 21 Day(s) KF2514L/SFlange surface, left5 to 60No auto-switch (no built-in magnet)No switch-None

MYR 4,788.70

1 Piece(s) 21 Day(s) KF2514L/SFlange surface, left5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 4,577.75

1 Piece(s) 17 Day(s) or more KF2514L/SFlange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed0.5None

MYR 5,106.97

1 Piece(s) 21 Day(s) KF2514L/SFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed0.5None

MYR 4,463.59

1 Piece(s) 17 Day(s) or more KF2514L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closed0.5None

MYR 4,447.66

1 Piece(s) 22 Day(s) or more KF2514L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closed3None

MYR 4,254.42

1 Piece(s) 17 Day(s) or more KF2514L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 4,621.66

1 Piece(s) 22 Day(s) or more KF2514L/SFlange surface, back5 to 60D-M9P solid-state auto switch2 pcs. valve open/closed3None

MYR 4,700.96

1 Piece(s) 17 Day(s) or more KF2514L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switch-With heater for 120℃

MYR 4,413.20

1 Piece(s) 17 Day(s) or more KF2514L/SFlange surface, right5 to 60D-A93 reed auto switch2 pcs. valve open/closed0.5None

MYR 4,305.44

1 Piece(s) 17 Day(s) or more KF2514L/SFlange surface, right5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 4,564.40

1 Piece(s) 22 Day(s) or more KF2514L/SFlange surface, right5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed3None

MYR 4,621.66

1 Piece(s) 22 Day(s) or more KF2514L/SFlange surface, right5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed3None

MYR 6,050.75

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60No auto-switch (no built-in magnet)No switch-None

MYR 5,497.48

1 Piece(s) 17 Day(s) or more KF4045L/SFlange side5 to 60D-A90 reed auto switch2 pcs. valve open/closed0.5None

MYR 6,249.40

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closed0.5None

MYR 6,075.48

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 6,378.73

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed0.5None

MYR 6,214.52

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closed0.5None

MYR 5,717.08

1 Piece(s) 17 Day(s) or more KF4045L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed3None

MYR 5,752.17

1 Piece(s) 17 Day(s) or more KF4045L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed5None

MYR 6,388.45

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed0.5None

MYR 6,219.38

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve open0.5None

MYR 6,219.38

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closed0.5None

MYR 6,428.18

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed3None

MYR 5,760.98

1 Piece(s) 17 Day(s) or more KF4045L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed5None

MYR 5,690.72

1 Piece(s) 7 Day(s) or more KF4045L/SFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closed0.5None

MYR 5,725.81

1 Piece(s) 17 Day(s) or more KF4045L/SFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closed3None

MYR 6,139.92

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 150No auto-switch (no built-in magnet)No switch-None

MYR 6,438.33

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 150No auto-switch (no built-in magnet)No switch-With heater for 100°C

MYR 6,587.10

1 Piece(s) 21 Day(s) KF4045L/SFlange side5 to 150No auto-switch (no built-in magnet)No switch-With heater for 120℃

MYR 6,050.75

1 Piece(s) 21 Day(s) KF4045L/SFlange surface, left5 to 60No auto-switch (no built-in magnet)No switch-None

MYR 5,497.48

1 Piece(s) 17 Day(s) or more KF4045L/SFlange surface, left5 to 60D-A90 reed auto switch2 pcs. valve open/closed0.5None

MYR 5,717.08

1 Piece(s) 22 Day(s) or more KF4045L/SFlange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed3None

MYR 5,754.58

1 Piece(s) 22 Day(s) or more KF4045L/SFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed3None

MYR 5,392.13

1 Piece(s) 7 Day(s) or more KF4045L/SFlange surface, back5 to 60No auto-switch (no built-in magnet)No switch-None

MYR 5,596.51

1 Piece(s) 17 Day(s) or more KF4045L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closed0.5None

MYR 5,498.88

1 Piece(s) 22 Day(s) or more KF4045L/SFlange surface, back5 to 60D-A93 reed auto switch1 pc. valve open3None

MYR 6,075.48

1 Piece(s) 21 Day(s) KF4045L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 5,565.74

1 Piece(s) 17 Day(s) or more KF4045L/SFlange surface, back5 to 60D-M9B solid-state auto switch1 pc. valve closed0.5None

MYR 6,219.38

1 Piece(s) 21 Day(s) KF4045L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve closed0.5None

MYR 5,763.39

1 Piece(s) 17 Day(s) or more KF4045L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switch-With heater for 100°C

MYR 5,871.01

1 Piece(s) 17 Day(s) or more KF4045L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switch-With heater for 120℃

MYR 5,565.74

1 Piece(s) 32 Day(s) or more ---------

MYR 5,728.99

1 Piece(s) 22 Day(s) or more KF4045L/SFlange surface, right5 to 60D-M9N solid-state auto switch2 pcs. valve open/closed3None

MYR 6,915.08

1 Piece(s) 21 Day(s) KF5080L/SFlange side5 to 60No auto-switch (no built-in magnet)No switch-None

MYR 6,280.70

1 Piece(s) 17 Day(s) or more KF5080L/SFlange side5 to 60D-A90 reed auto switch2 pcs. valve open/closed0.5None

MYR 6,315.79

1 Piece(s) 17 Day(s) or more KF5080L/SFlange side5 to 60D-A90 reed auto switch2 pcs. valve open/closed3None

MYR 7,153.45

1 Piece(s) 21 Day(s) KF5080L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closed3None

MYR 6,944.67

1 Piece(s) 21 Day(s) KF5080L/SFlange side5 to 60No auto-switch (with built-in magnet)No switch-None

MYR 6,465.12

1 Piece(s) 7 Day(s) or more KF5080L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closed0.5None

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Basic Information

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal Seal material FKM 1349-80 Amount of leakage(Pa·m3/s) Internal: 1.3 × 10-10, External: 1.3 × 10-11
Body Surface Treatment External: hard anodized aluminum, Internal: base material Seal Change Location None

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110 Part Numbers

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Specification/Dimensions

  • Flange Type

    • KF
    • K

    Clear

  • Flange Nominal

    • 25
    • 40
    • 50
    • 63
    • 80

    Clear

  • Sonic Speed Conductance

    • 14L/S
    • 45L/S
    • 80L/S
    • 160L/S
    • 200L/S

    Clear

  • Pilot Port Direction

    • Flange side
    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Temperature Range(°C)

    • 5 to 60
    • 5 to 150

    Clear

  • Switch Part Number

    • D-M9B solid-state auto switch
    • D-M9N solid-state auto switch
    • D-M9P solid-state auto switch
    • D-A90 reed auto switch
    • D-A93 reed auto switch
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)

    Clear

  • Number of Switches

    • 1 pc. valve closed
    • 1 pc. valve open
    • 2 pcs. valve open/closed
    • No switch

    Clear

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

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  • Heater Yes/No

    • With heater for 100°C
    • With heater for 120℃
    • None

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  • type

    • XLD
    • XLD-40
    • XLD-63
    • XLD-80

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  • CAD

    • 2D
    • 3D

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Days to Ship

    • All
    • 7 Day(s) or Less
    • 17 Day(s) or Less
    • 21 Day(s) or Less
    • 22 Day(s) or Less
    • 32 Day(s) or Less

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