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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series (XLH-16-XN1A)
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XLH-16-XN1A
| Part Number |
|---|
| XLH-16-XN1A |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 2,129.25 | 1 Piece(s) | 17 Day(s) or more | 16 | 5L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None |
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Basic Information
| Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows Seal |
Specification/Dimensions
-
type
- XLH
- XLH-16
-
Flange Nominal
- 16
- 25
- 40
- 50
-
Sonic Speed Conductance
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Heater Yes/No
- With heater for 120℃
- None
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 7 Day(s) or Less
- 17 Day(s) or Less
- 21 Day(s) or Less
- 22 Day(s) or Less
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Vacuum Assist Valve ZP2V Series
- Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
- Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
- Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
- Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
- Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
- Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
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