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Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) (XLS-16-5G)
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XLS-16-5G
Basic Information
| Type | Solenoid Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
| Driving Type | Directly Operated | Pipe Port Type | Flange | Flange Type | KF |
| Seal Type | Bellows Seal | CE-marked | None |
Specification/Dimensions
-
type
- XLS
- XLS-16
-
Flange Nominal
- 16
- 25
-
Voltage
- DC24V
- AC100V
- AC200V
-
Sonic Speed Conductance
-
Electrical Entry Method
- DIN terminal
- Grommet
- Terminal
-
Control Power Supply Yes/No
- None
- With control power supply
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 17 Day(s) or Less
- 21 Day(s) or Less
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series
- Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
- Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
- Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
- Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series
- Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
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