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Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
· Flame-retardant (UL94V-0 compliant).
· Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
· Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
· Improved sealing performance, securely sealing with its powerful spring.
· Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
*For DC specification / class B.
| Standard Price: | MYR 1,235.21- |
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| Days to Ship: | 7 Day(s) or more |

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
| Standard Price: | MYR 4,897.81- |
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| Days to Ship: | 17 Day(s) or more |

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.
| Standard Price: | MYR 2,534.41- |
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| Days to Ship: | 17 Day(s) or more |

SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
| Standard Price: | MYR 2,522.98- |
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| Days to Ship: | 22 Day(s) or more |
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| Product Series |
| CAD |
| Days to Ship |
| Type |
| Application |
| Mounting Orientation |
| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
| Brand | SMC | SMC | SMC | SMC |
|---|---|---|---|---|
| Product Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | |
| CAD |
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| Days to Ship | 7 Day(s) or more | 17 Day(s) or more | 17 Day(s) or more | 22 Day(s) or more |
| Type | High Vacuum Solenoid | High Vacuum Solenoid | High Vacuum Solenoid | High Vacuum Solenoid |
| Application | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 3-Port Valve | 2-Port Valve |
| Solenoid Type | Single | Single | Single | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | Directly Operated | Directly Operated | Air Pilot | Directly Operated |
| Effective Sectional Area(mm2) | - | - | - | - |
| Pipe Port Type | Rc / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | Flange |
| Plumbing Thread Nominal | 1/8 / 1/4 / 3/8 | - | - | - |
| Connecting Tube Diameter | - | - | - | - |
| Flange Type | - | KF / K | NW | KF |
| Flange Nominal | - | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 | 16 / 25 / 40 / 80 |
| CV Value | - | - | - | - |
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