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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (Part Numbers)
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Pilot Port Direction | Switch Part Number | Number of Switches | Electrical Entry Method | Light/Surge Voltage Suppressor | CE-marked | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 4,913.45 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | AC100V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
MYR 4,931.07 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | AC100V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 4,948.62 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | AC200V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 5,084.06 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | CE-marked | - | ||
MYR 4,915.36 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
MYR 4,937.31 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
MYR 5,381.55 | 1 Piece(s) | 21 Day(s) | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 4,948.62 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 5,225.26 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | AC100V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 5,225.26 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | AC110V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 5,188.31 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 5,234.12 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | CE-marked | 3 | ||
MYR 5,212.12 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
MYR 5,205.22 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | M-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 5,256.39 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9P solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
MYR 4,897.81 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | AC110V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
MYR 4,931.07 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
MYR 4,897.81 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
MYR 5,366.97 | 1 Piece(s) | 21 Day(s) | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | - | ||
MYR 4,922.26 | 1 Piece(s) | 17 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | L-type plug connector | None | None | - | ||
MYR 4,948.62 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | CE-marked | - | ||
MYR 4,937.31 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
MYR 4,924.33 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 4,924.33 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 5,214.59 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | CE-marked | 0.5 | ||
MYR 5,227.81 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | None | None | 3 | ||
MYR 5,231.58 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 3 | ||
MYR 5,238.40 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | AC200V | 14L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 5,229.66 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | AC110V | 14L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 5,229.66 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | CE-marked | 0.5 | ||
MYR 5,229.66 | 1 Piece(s) | 22 Day(s) or more | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 6,188.91 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | AC100V | 45L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 6,171.36 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
MYR 6,186.97 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 6,226.47 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | AC220V | 45L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 6,216.81 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | - | ||
MYR 6,468.02 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | AC100V | 45L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 6,468.02 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 6,531.40 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | M-type plug connector | None | CE-marked | 3 | ||
MYR 6,169.14 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | AC100V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
MYR 6,176.92 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | AC100V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
MYR 6,169.42 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
MYR 6,176.92 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
MYR 6,185.73 | 1 Piece(s) | 17 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 6,216.49 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | - | ||
MYR 6,207.68 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
MYR 6,475.59 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
MYR 6,476.83 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 6,484.32 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 6,317.44 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | AC100V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve open | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
MYR 6,529.46 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
MYR 6,559.35 | 1 Piece(s) | 22 Day(s) or more | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 5 | ||
MYR 6,942.30 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | AC100V | 80L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
MYR 7,245.30 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | AC110V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 7,095.96 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 1 pc. valve closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 7,249.92 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
MYR 6,946.63 | 1 Piece(s) | 17 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | None | None | - | ||
MYR 7,030.11 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC12V | 80L/S | Flange surface, back | D-A90 reed auto switch | 1 pc. valve open | M-type plug connector | With light and surge voltage suppressor (non-polarized type) | CE-marked | 0.5 | ||
MYR 7,249.71 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
MYR 7,240.89 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
MYR 7,100.37 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve closed | M-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 7,297.94 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
MYR 7,109.18 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve open | M-type plug connector | With light and surge voltage suppressor | None | 1 | ||
MYR 7,249.71 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9P solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 7,249.71 | 1 Piece(s) | 22 Day(s) or more | KF | 50 | AC110V | 80L/S | Flange surface, right | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
MYR 9,769.70 | 1 Piece(s) | 22 Day(s) or more | K | 63 | DC24V | 160L/S | Flange surface, back | D-A90 reed auto switch | 1 pc. valve open | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
MYR 9,752.16 | 1 Piece(s) | 22 Day(s) or more | K | 63 | DC24V | 160L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
MYR 10,041.94 | 1 Piece(s) | 22 Day(s) or more | KF | 63 | DC24V | 160L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 3 | ||
MYR 12,962.86 | 1 Piece(s) | 17 Day(s) or more | KF | 80 | DC24V | 200L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | None | None | - |
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Basic Information
| Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
| Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Bellows Seal |
| Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
| Seal Change Location | None |
Specification/Dimensions
-
Flange Type
- KF
- K
-
Flange Nominal
- 25
- 40
- 50
- 63
- 80
-
Voltage
- DC12V
- DC24V
- AC100V
- AC200V
- AC110V
- AC220V
-
Sonic Speed Conductance
-
Pilot Port Direction
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- No switch
-
Electrical Entry Method
- Grommet (lead wire length: 300 mm)
- Grommet (lead wire length: 600 mm)
- L-type plug connector
- M-type plug connector
-
Light/Surge Voltage Suppressor
- None
- With light and surge voltage suppressor
- With light and surge voltage suppressor (non-polarized type)
- With surge voltage suppressor
-
CE-marked
- CE-marked
- None
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
type
- XLDV
- XLDV-25
- XLDV-50
- XLDV-80
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 17 Day(s) or Less
- 21 Day(s) or Less
- 22 Day(s) or Less
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
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- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve
- Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
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- Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
- Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
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