Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 19/4/2026 to 7:00 (MYT) 20/4/2026. We apologize for the inconvenience.
[Notice] Japan & China Golden Week holidays will start from 29 April to 6 May 2026. Kindly expect longer response from suppliers and possible delivery delay due to high volume of shipments after holiday. Early order placement is recommended. More details
[Announcement] MISUMI Malaysia website new user interface. Clearer navigation, easy product search and more. Explore now! May contact us at (60) 3 7890 6399 for any inquiries.

How can we improve?

How can we improve?

Comments

Name (Optional)

E-mail Address (Optional)

Tel (Optional)

While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Customer Privacy Policy

Thank you for your cooperation.

While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Please use the inquiry form.

Customer Privacy Policy

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series (Part Numbers)

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

: 30; 60; 90

Part Number
XMD-25
XMD-25-A90A
XMD-25-A93A
XMD-25-A93LC
XMD-25-M9//
XMD-25-M9BA
XMD-25-M9BC
XMD-25-M9NB
XMD-25-M9NC
XMD-25-XQ1A
XMD-25-XR1A
XMD-25L
XMD-25L-M9//
XMD-25MH0
XMD-40-A90LA
XMD-40-A93LA
XMD-40-A93LB
XMD-40-M9//
XMD-40-M9BA
XMD-40-M9BC
XMD-40-M9BLA
XMD-40-M9NLA
XMD-40-XR1A
XMD-40C
XMD-40C-A90LA
XMD-40C-M9BC
XMD-40C-M9NA
XMD-40C-M9NLA
XMD-40C-M9NLC
XMD-40CH0
XMD-40CL-A93LA-XS1B
XMD-40CL-M9//
XMD-40CL-M9BA
XMD-40CL-M9NA
XMD-40CL-M9NLA
XMD-40H0
XMD-40H0-XN1A
XMD-40KH0
XMD-40L
XMD-40L-M9//-XQ1A
XMD-40L-M9BA
XMD-40L-M9BLA
XMD-40L-M9NA
XMD-40L-M9NA-XP1A
XMD-40M
XMD-50-A90LA
XMD-50-A93C
XMD-50-M9//
XMD-50-M9BLA-XP1A
XMD-50-M9NA
XMD-50H0-XQ1A
XMD-50H0-XR1A
XMD-50K
XMD-50LH0
XMD-63
XMD-63-M9BA
XMD-63-XS1A
XMD-63C
XMD-63C-A90LA
XMD-63C-M9NLC
XMD-63CL
XMD-63D-M9//
XMD-63D-M9BA
XMD-63D-M9BLA
XMD-63D-M9PLA
XMD-63DL-M9BLA
XMD-63L-M9//
XMD-63L-M9BLA
XMD-80D
XMD-80D-M9BA
XMD-80DLH0
XMD-80H0
XMD-80L-M9BLA
XYD-25-M9//-XP1A
XYD-25-M9//-XR3A
XYD-25-M9BA
XYD-25-M9BC
XYD-25-M9BLC
XYD-25-M9NLA
XYD-25H0
XYD-25K-M9BLA
XYD-25KH0
XYD-40
XYD-40-A90LA
XYD-40-A93A-XP1B
XYD-40-A93A-XP1C
XYD-40-M9//
XYD-40-M9BA
XYD-40-M9BLA
XYD-40-M9PA

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Sonic Speed Conductance	Valve Type	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
MYR 5,498.08	1 Piece(s)	21 Day(s)	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 4,411.82	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,435.42	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,411.82	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 4,324.02	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 4,549.43	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,451.32	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,409.19	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,455.73	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 5,496.44	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 8,264.12	1 Piece(s)	21 Day(s)	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 4,306.39	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 4,276.81	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 4,372.25	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	Angle type	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,042.75	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,133.20	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,027.84	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 7,625.37	1 Piece(s)	21 Day(s)	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,192.09	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,047.16	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 8,018.67	1 Piece(s)	21 Day(s)	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,256.18	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 12,073.70	1 Piece(s)	21 Day(s)	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 6,234.22	1 Piece(s)	17 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,374.75	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,372.32	1 Piece(s)	17 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,532.82	1 Piece(s)	17 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,567.99	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,401.10	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,305.83	1 Piece(s)	17 Day(s) or more	CF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,690.96	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal / S valve seal assembly / O-ring for fixing	3
MYR 6,247.43	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,515.34	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,532.82	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,567.99	1 Piece(s)	22 Day(s) or more	CF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 5,981.30	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,225.41	1 Piece(s)	22 Day(s) or more	KF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 5,982.25	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 5,922.41	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 7,547.24	1 Piece(s)	22 Day(s) or more	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 6,212.27	1 Piece(s)	32 Day(s) or more	-	-	-	-	-	-	-	-	-	-	-	-
MYR 6,247.36	1 Piece(s)	22 Day(s) or more	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,201.85	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 7,986.36	1 Piece(s)	22 Day(s) or more	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	0.5
MYR 7,596.68	1 Piece(s)	21 Day(s)	KF	40	45L/S	Angle type	Flange surface, right	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 7,037.87	1 Piece(s)	32 Day(s) or more	-	-	-	-	-	-	-	-	-	-	-	-
MYR 6,985.15	1 Piece(s)	17 Day(s) or more	KF	50	80L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,923.70	1 Piece(s)	17 Day(s) or more	KF	50	80L/S	Angle type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,316.93	1 Piece(s)	22 Day(s) or more	KF	50	80L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	3
MYR 7,199.21	1 Piece(s)	17 Day(s) or more	KF	50	80L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 9,327.81	1 Piece(s)	22 Day(s) or more	KF	50	80L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 11,620.09	1 Piece(s)	22 Day(s) or more	KF	50	80L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 6,899.41	1 Piece(s)	17 Day(s) or more	KF	50	80L/S	Angle type	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,985.15	1 Piece(s)	17 Day(s) or more	KF	50	80L/S	Angle type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,435.50	1 Piece(s)	17 Day(s) or more	KF	63	160L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,725.36	1 Piece(s)	17 Day(s) or more	KF	63	160L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 9,694.59	1 Piece(s)	17 Day(s) or more	KF	63	160L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 9,747.31	1 Piece(s)	17 Day(s) or more	CF	63	160L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,887.83	1 Piece(s)	22 Day(s) or more	CF	63	160L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 9,914.19	1 Piece(s)	22 Day(s) or more	CF	63	160L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 9,747.31	1 Piece(s)	17 Day(s) or more	CF	63	160L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,533.89	1 Piece(s)	17 Day(s) or more	K	63	160L/S	Angle type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,725.36	1 Piece(s)	17 Day(s) or more	K	63	160L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 9,760.45	1 Piece(s)	22 Day(s) or more	K	63	160L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 9,769.26	1 Piece(s)	32 Day(s) or more	-	-	-	-	-	-	-	-	-	-	-	-
MYR 9,760.45	1 Piece(s)	22 Day(s) or more	K	63	160L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 9,470.67	1 Piece(s)	17 Day(s) or more	KF	63	160L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 9,760.45	1 Piece(s)	22 Day(s) or more	KF	63	160L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 16,881.82	1 Piece(s)	21 Day(s)	K	80	200L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 13,361.42	1 Piece(s)	17 Day(s) or more	K	80	200L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 13,373.52	1 Piece(s)	17 Day(s) or more	K	80	200L/S	Angle type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 13,373.52	1 Piece(s)	17 Day(s) or more	KF	80	200L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 13,396.51	1 Piece(s)	22 Day(s) or more	KF	80	200L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 5,855.32	1 Piece(s)	22 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 7,041.04	1 Piece(s)	22 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	Chemraz SSE38	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
MYR 5,097.81	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,915.40	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 4,934.39	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 5,141.71	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 5,280.47	1 Piece(s)	21 Day(s)	KF	25	14L/S	In-line type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 5,132.98	1 Piece(s)	22 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, left	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 4,836.41	1 Piece(s)	17 Day(s) or more	KF	25	14L/S	In-line type	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,412.32	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 6,555.20	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 7,917.09	1 Piece(s)	22 Day(s) or more	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal / S valve seal assembly / O-ring for fixing	0.5
MYR 7,047.59	1 Piece(s)	22 Day(s) or more	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	Barrel Perfluoro 70W	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal	0.5
MYR 7,006.92	1 Piece(s)	21 Day(s)	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
MYR 7,300.90	1 Piece(s)	21 Day(s)	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
MYR 6,737.27	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
MYR 6,710.91	1 Piece(s)	17 Day(s) or more	KF	40	45L/S	In-line type	Flange surface, back	5 to 60	D-M9P solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5

Basic Information

Type	Pilot Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

Configure

114 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- KF
- K
- CF
Clear
Flange Nominal
- 25
- 40
- 50
- 63
- 80
Clear
Sonic Speed Conductance
14L/S

45L/S

80L/S

160L/S

200L/S
Clear
Valve Type
- Angle type
- In-line type
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B solid-state auto switch

D-M9N solid-state auto switch

D-M9P solid-state auto switch

D-A90 reed auto switch

D-A93 reed auto switch

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- No switch
Clear
Seal material
Chemraz SSE38

Barrel Perfluoro 70W

Chemraz SS592

VMQ 1232-70

FKM 1349-80

EPDM 2101-80

Kalrez 4079
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal / S valve seal assembly / O-ring for fixing

Valve seal / external seal / S valve seal assembly / O-ring for fixing
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 3
Clear
type
- XMD
- XYD
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

7 Day(s) or Less

17 Day(s) or Less

21 Day(s) or Less

22 Day(s) or Less

32 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

Additional Products in this Category

Tech Support

: Technical Inquiry

How can we improve?

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Valve Type

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m³/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

CAD

Days to Ship

Specify Alterations

Additional Products in this Category

Tech Support

Payment Method

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9am – 6pm (Mon – Fri) * Order cut-off time is 5pm, 9am – 1pm(Sat) * Order cut-off time is 12pm

How can we improve?

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Valve Type

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

CAD

Days to Ship

Specify Alterations

Additional Products in this Category

Tech Support

Payment Method

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9am – 6pm (Mon – Fri) * Order cut-off time is 5pm, 9am – 1pm(Sat) * Order cut-off time is 12pm

Amount of leakage(Pa·m³/s)