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Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series (Part Numbers)

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

Part Number
XYD-40H0
XYD-40H0-XN1A
XYD-40KH0
XYD-40M
XYD-50
XYD-50-A90A
XYD-50-A93A
XYD-50-M9//
XYD-50-M9BA
XYD-50-M9PA
XYD-50H0-XN1A
XYD-50K-M9//
XYD-50KH0-XQ1A
XYD-50MH0-XQ1A
XYD-63
XYD-63-M9BA
XYD-63-M9NA
XYD-63D-M9//
XYD-63D-M9NA
XYD-63H0
XYD-80-M9BA
XYD-80K-M9BA
XYD-80K-M9PA
XYD-80KH0
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Valve Type Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Seal Change Location Length of Lead Wire for Switch
(m)

MYR 7,069.58

1 Piece(s) 21 Day(s) KF4045L/SIn-line typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 6,715.32

1 Piece(s) 22 Day(s) or more KF4045L/SIn-line typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

MYR 6,491.31

1 Piece(s) 7 Day(s) or more KF4045L/SIn-line typeFlange surface, left5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 6,412.32

1 Piece(s) 17 Day(s) or more KF4045L/SIn-line typeFlange surface, right5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 8,178.48

1 Piece(s) 21 Day(s) KF5080L/SIn-line typeFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 7,618.50

1 Piece(s) 17 Day(s) or more KF5080L/SIn-line typeFlange surface, back5 to 60D-A90 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 7,688.76

1 Piece(s) 17 Day(s) or more KF5080L/SIn-line typeFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 8,207.60

1 Piece(s) 21 Day(s) KF5080L/SIn-line typeFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 8,496.75

1 Piece(s) 21 Day(s) KF5080L/SIn-line typeFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 7,834.26

1 Piece(s) 17 Day(s) or more KF5080L/SIn-line typeFlange surface, back5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 7,847.48

1 Piece(s) 22 Day(s) or more KF5080L/SIn-line typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

MYR 7,562.03

1 Piece(s) 17 Day(s) or more KF5080L/SIn-line typeFlange surface, left5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 9,941.46

1 Piece(s) 22 Day(s) or more KF5080L/SIn-line typeFlange surface, left5 to 150No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

MYR 9,941.46

1 Piece(s) 22 Day(s) or more KF5080L/SIn-line typeFlange surface, right5 to 150No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

MYR 10,244.78

1 Piece(s) 17 Day(s) or more KF63160L/SIn-line typeFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 10,534.64

1 Piece(s) 17 Day(s) or more KF63160L/SIn-line typeFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 10,450.92

1 Piece(s) 17 Day(s) or more KF63160L/SIn-line typeFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 11,115.33

1 Piece(s) 21 Day(s) K63160L/SIn-line typeFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 11,404.48

1 Piece(s) 21 Day(s) K63160L/SIn-line typeFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 10,252.52

1 Piece(s) 17 Day(s) or more KF63160L/SIn-line typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

MYR 14,376.76

1 Piece(s) 17 Day(s) or more KF80200L/SIn-line typeFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 14,376.76

1 Piece(s) 32 Day(s) or more ------------

MYR 15,794.55

1 Piece(s) 21 Day(s) KF80200L/SIn-line typeFlange surface, left5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

MYR 14,240.65

1 Piece(s) 32 Day(s) or more ------------

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

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